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TORRI

TORRI

Multi-stage rotary lobe vacuum pumps

The compact and energy-efficient solution for load lock chambers

  • Low vibration and noise levels
  • Light-weight
  • Small size
  • Dry and contact-free operating principle
  • Long service life
  • Low total cost of ownership

Nominal pumping speed: Min. 100 m³/h Max. 600 m³/h
Ultimate pressure: Min. 0.01 hPa(mbar) Max. 0.001 hPa(mbar)

TORRI BD 0100–0600 A