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COBRA Semicon
Dry screw vacuum pumps
The air-cooled plug&pump solution
- Advanced screw design
- Dry and contact-free operating principle
- Unique “flying bearing” design
- Cantilever construction
- Compact design
- Effective air cooling
- Optional frequency converter
Nominal pumping speed: Min. 85 m³/h Max. 105 m³/h
Ultimate pressure: 0.01 hPa (mbar)
COBRA BA 0100 C
The ideal solution for light to medium semiconductor applications
- Advanced screw design
- Dry and contact-free operating principle
- Unique “flying bearing” design
- Cantilever construction
- Compact fit-in-place design
- Direct water cooling
- Fully open communication protocol
COBRA BC 0101 G
Nominal pumping speed: 100 m³/h
Ultimate pressure: 0.01 hPa (mbar)
COBRA BC 0601–1200 A/G
Nominal pumping speed: Min. 550 m³/h Max. 1200 m³/h
Ultimate pressure: 0.003 hPa (mbar)
The new generation of dry vacuum pumps for demanding processes
- Advanced screw design
- Dry and contact-free operating principle
- Excellent powder handling
- Effective indirect water cooling
- Compact fit-in-place design
- High pumping speed for the discharge of hydrogen
- High-efficiency motor
- Sizes with integrated vacuum booster available
COBRA DS 0080/0160 G
Nominal pumping speed: Min. 70 m³/h Max. 160 m³/h
Ultimate pressure: 0.03 hPa (mbar)
COBRA DS 0600 E
Nominal pumping speed: 600 m³/h
Ultimate pressure: 0.01 hPa (mbar)
COBRA DS 0700–2000 G
Nominal pumping speed: Min. 500 m³/h Max. 1640 m³/h
Ultimate pressure: 0.003 hPa (mbar)
COBRA DS 1200/1800 A/A X
Nominal pumping speed: Min. 1200 m³/h Max. 1700 m³/h
Ultimate pressure: 0.003 hPa (mbar)
COBRA DS 2141 A
Nominal pumping speed: 1875 m³/h
Ultimate pressure: 0.003 hPa (mbar)
COBRA DS 3010/3161 C/G
Nominal pumping speed: 3200 m³/h
Ultimate pressure: 0.001 hPa (mbar)
COBRA DS 3181 C
Nominal pumping speed: 3500 m³/h
Ultimate pressure: 0.001 hPa (mbar)
COBRA DS 5161–9161 B/F
Nominal pumping speed: Min. 4300 m³/h Max. 6160 m³/h
Ultimate pressure: 0.001 hPa (mbar)
COBRA DS 8162/8163 B/F
Nominal pumping speed: Min. 7000 m³/h Max. 7385 m³/h
Ultimate pressure: 0.001 hPa (mbar)
