Gas Abatement Systems
Wet scrubber gas abatement for EPI processes
- Innovative wet scrubber technology
- For critical EPI processes in the semiconductor industry
- Patented inlet clogging preventer
- Extended service intervals
- No honey trap necessary to collect by-products
- Frequency-controlled venturi unit
- Four process inlets for connection to four different chambers
Safe thermal-wet gas abatement
- Combination of flameless catalytic and thermal-wet gas abatement technology
- Treatment of combustible and soluble gases
- High temperature electric heater
- Four process inlets for connection to four different chambers