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Gas Abatement Systems – GABA

Gas Abatement Systems

Wet scrubber gas abatement for EPI processes
  • Innovative wet scrubber technology
  • For critical EPI processes in the semiconductor industry
  • Patented inlet clogging preventer
  • Extended service intervals
  • No honey trap necessary to collect by-products
  • Frequency-controlled venturi unit
  • Four process inlets for connection to four different chambers

Safe thermal-wet gas abatement

  • Combination of flameless catalytic and thermal-wet gas abatement technology
  • Treatment of combustible and soluble gases
  • High temperature electric heater
  • Four process inlets for connection to four different chambers