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Vacuum Gauges
Controlling the vacuum level ensures smooth processes and highest product quality.
Types of Vacuum Gauges
Accurate pressure measurement is a key factor in vacuum-assisted production processes. It ensures optimum efficiency and high product quality. Several sensor technologies are available to measure all 14 decades of vacuum with accuracy. They can be divided into two main categories: direct and indirect pressure measurement.
Different measurement principles are required depending on the vacuum level in your process. There are four levels of vacuum:
1. Rough 2. Medium 3. High 4. Ultra-high
Direct pressure measurement:
- Piezoresistive sensor
- Capacitive sensor
Indirect pressure measurement:
- Pirani gauges
- Cold cathode gauges
- Hot cathode gauges
Direct pressure measurement:
The robust and cost-effective Piezoresistive sensor technology measures the change in resistance of a strain gauge resulting from the diaphragm deflection. Its robustness and versatility make it the best choice for an absolute pressure measurement in the rough vacuum range.
- Measurement range: 1600 to 1 mbar
- Excellent measurement accuracy
- Chemically resistant ceramic sensor
- Short response time
- High reliability
- Long term stability
High resolution and accurate capacitive sensors measure the change in electrical capacitance of a plate condenser induced by the diaphragm deflection. These sensors have been specially designed for industrial applications where high accuracy and chemical compatibility are required.
- Measurement range: 200 to 0.1 mbar
- Excellent measurement accuracy
- Chemically resistant ceramic sensor
- High reliability
- Temperature compensated
- Industrial metal design
- High protection class
Indirect pressure measurement:
The robust and reliable Pirani technology measures the thermal conductivity of gases. The heat transfer between a heated filament and its surrounding environment will change in proportion to the pressure. Pirani sensors are the best solution for medium vacuum applications.
- Wide measurement range from 1000 to 1·10-4 mbar
- Optional combination with a Piezoresistive sensor to increase accuracy when measuring high pressures
- Spiral coil filament for better accuracy and durability
- Superior stability through individual temperature compensation
- Excellent resistance to contamination
- Optional Pt/Rh filament for corrosive applications
Cost-effective and robust cold cathodes (inverted magnetron) measure the electrical conductivity of a plasma. Neutral gas molecules are ionized through collision with electrons and collected by the cathode. The generated current is an indication of the pressure in high and ultra high vacuum processes.
- Combination with a Pirani sensor for an extended measurement range: 1000 to 5·10-9 mbar
- Low measurement uncertainty: <25% for high vacuum
- Automatic power-on and power-off to extend sensor life
- Fast ignition even at high vacuum
- Low magnetic stray field
- Automatic adjustment of Pirani zero pressure during operation
Stable and reproducible hot cathodes after the Bayard-Alpert principle measure the gas ionization via thermal electron emission. The ion collector current is linearly related to the gas pressure. This technology is one of the most accurate measurement principles for high and ultra-high vacuum.
- Combination with a Pirani sensor for an extended measurement range: 1000 to 5·10-10 mbar
- Excellent measurement accuracy: <10% uncertainty below 10 mbar
- Enhanced lifetime due to double filament
- Automatic power-on and power-off to extend sensor life
- Automatic adjustment of Pirani zero pressure during operation
- Tested with >100,000 shock venting cycles
